Faculté des sciences

Miniaturized, focusing fan-out elements: design, fabrication and characterization

Schilling, Andreas ; Nussbaum, Philippe ; Ossmann, Ch. ; Traut, S. ; Rossi, Markus ; Schift, H. ; Herzig, Hans-Peter

In: Journal of Optics A: Pure and Applied Optics, 1999, vol. 1, no. 2, p. 244-248

We present miniaturized, focusing fan-out elements. The new micro-optical elements were fabricated using different technologies: double-sided injection moulding in polycarbonate, double-sided photolithography with subsequent transfer in quartz and direct laser writing in photoresist. The fan-out elements were characterized by measuring their efficiency and uniformity, the surface profiles of the... Plus

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    Summary
    We present miniaturized, focusing fan-out elements. The new micro-optical elements were fabricated using different technologies: double-sided injection moulding in polycarbonate, double-sided photolithography with subsequent transfer in quartz and direct laser writing in photoresist. The fan-out elements were characterized by measuring their efficiency and uniformity, the surface profiles of the microlenses were measured with a Twyman-Green interferometer. The overall performance of the combined, hybrid elements is demonstrated with intensity distributions recorded in the focal planes.