Faculté des sciences

Micro-sized spectrometer based on a lamellar grating interferometer

Manzardo, Omar ; Michaely, Roland ; Schadelin, Felix ; Herzig, Hans-Peter ; Noell, Wilfried ; Overstolz, Thomas ; de Rooij, Nicolaas F.

In: IEEE/LEOS (Lasers and Electro-Optics Society) International Conference on Optical MEMS, 2003, p. 175-176

A lamellar grating interferometer (LGI) realized by silicon micro-machining is presented. The LGI is a binary grating with a variable depth. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon-on-insulator (SOI) technology. It is used as Fourier transform spectrometer (FTS). We have measured an optical path difference maximum of 82 /spl μ/m. The measured... Plus

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    Summary
    A lamellar grating interferometer (LGI) realized by silicon micro-machining is presented. The LGI is a binary grating with a variable depth. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon-on-insulator (SOI) technology. It is used as Fourier transform spectrometer (FTS). We have measured an optical path difference maximum of 82 /spl μ/m. The measured resolution of the spectrometer after the phase correction is 6 nm at a wavelength of 633 nm. A preliminary measurement with a xenon arc lamp is shown.