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Piezoelectric micromachined ultrasonic transducers with thick PZT sol gel films

Belgacem, Brahmin ; Calame, Florian ; Muralt, Paul

In: Journal of Electroceramics, 2007, vol. 19, no. 4, p. 369-373

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    Titre
    • Piezoelectric micromachined ultrasonic transducers with thick PZT sol gel films
    Auteur
    • Belgacem, Brahmin. Ceramics Laboratory, Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland
    • Calame, Florian. Ceramics Laboratory, Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland
    • Muralt, Paul. Ceramics Laboratory, Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland
    Type de document
    • Postprint
    Langue
    • Anglais
    Publié dans
    • Journal of Electroceramics, 2007, vol. 19, no. 4, p. 369-373. Springer US; http://www.springer-ny.com
    Autre version électronique
    Identifiant OAI-PMH
    • oai:doc.rero.ch:315051
    Summary
    The fabricated micro machined ultrasonic transducers (pMUT) was based on piezoelectric laminated plates operating at flexural modes. The fabricated bimorph pMUT transducers were composed of 5-layers. A 4μm thick lead zirconate titanate (PZT) thin film deposited by a sol-gel method was used. The piezoelectric layer exhibited a capacitance corresponding to a permitivity of ɛ r = 1,200. The electromechanical coupling coefficient (k 2) and quality factor (Q) were measured as k 2 = 4.4% and Q = 145 in air for a low frequency transducer (240kHz). The effect of DC bias voltage on frequency and k 2 has been studied. The 16.9MHz transducer yielded values of Q = 25 in air and k 2 = 3%