Faculté des sciences

A photopatternable superparamagnetic nanocomposite: Material characterization and fabrication of microstructures

Suter, M. ; Ergeneman, , O. ; Zürcher, J. ; Moitzi, Christian ; Pané, S. ; Rudin, T. ; Pratsinis, S.E. ; Nelson, B.J. ; Hierold, C.

In: Sensors and Actuators B: Chemical, 2011, vol. 156, no. 1, p. 433-443

A superparamagnetic nanocomposite obtained by dispersing superparamagnetic magnetite nanoparticles in the epoxy SU-8 is used to fabricate microstructures by photolithography. The dispersion of the nanoparticles and the level of agglomerations are analyzed by optical microscopy, TEM (transmission electron microscope), SAXS (small-angle X-ray scattering), XDC (X-ray disc centrifuge) and XRD (X-ray... Plus

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    Summary
    A superparamagnetic nanocomposite obtained by dispersing superparamagnetic magnetite nanoparticles in the epoxy SU-8 is used to fabricate microstructures by photolithography. The dispersion of the nanoparticles and the level of agglomerations are analyzed by optical microscopy, TEM (transmission electron microscope), SAXS (small-angle X-ray scattering), XDC (X-ray disc centrifuge) and XRD (X-ray diffraction). Two different phosphate-based dispersing agents are compared. In order to obtain a high-quality nanocomposite, the influence of particle concentration 1–10 vol.% (4–32 wt.%) on composite fabrication steps such as spin coating and UV exposure are systematically analyzed. Features with narrow widths (down to 1.3 μm) are obtained for composites with 5 vol.% particle concentration. Mechanical, magnetic and wetting properties of the nanocomposites are characterized. These nanocomposites exhibit superparamagnetic properties with a saturation magnetization up to 27.9 kA m⁻¹ for10 vol.%. All nanocomposites show no differences in surface polarity with respect to pure SU-8, and exhibit a moderate hydrophobic behavior (advancing dynamic contact angles approximately 81°). Microcantilevers with particle concentrations of 0–5 vol.% were successfully fabricated and were used to determine the dynamic Young's modulus of the composite. A slight increase of the Young's modulus with increased particle concentration from 4.1 GPa (pure SU-8) up to 5.1 GPa (for 5 vol.%) was observed.