Faculté des sciences

High-rate deposition of hydrogenated amorphous silicon by the VHF-GD method

Curtins, H. ; Favre, M. ; Wyrsch, Nicolas ; Brechet M. ; Prasad K. ; Shah, Arvind

In: Proceedings of the 19th IEEE Photovoltaic Specialists Conference, 1987, p. 695-698

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